Journal of Micro/Nanolithography, MEMS, and MOEMS

Journal of Micro/Nanolithography, MEMS, and MOEMS

Manylion Llyfryddiaeth
Fformat:	Electronig Cylchgrawn
Iaith:	English
Cyhoeddwyd:	SPIE
Mynediad Ar-lein:	Full text available on SPIE Digital Library Off-campus access

Eitemau Tebyg

Journal of Micro/Nanolithography, MEMS, and MOEMS

Journal of Micro/Nanolithography, MEMS, and MOEMS

MEMS, MOEMS, and Micromachining

MEMS and MOEMS Technology and Applications
gan: Rai-Choudhury, Prosenjit
Cyhoeddwyd: (2009)

MEMS and MOEMS Technology and Applications
gan: Rai-Choudhury, Prosenjit

MEMS/MOEMS Technologies and Applications

MEMS/MOEMS Components and Their Applications

MEMS, MOEMS, and Micromachining II

MEMS, MOEMS, and Micromachining III

Optical Physics for Nanolithography
gan: Yen, Anthony
Cyhoeddwyd: (2018)

Optical Physics for Nanolithography
gan: Yen, Anthony

Micro-Optics and MOEMS

Design, Test, and Microfabrication of MEMS and MOEMS

Reliability, Testing, and Characterization of MEMS/MOEMS

MEMS/MOEMS Technologies and Applications II

ICO20: MEMS, MOEMS, and NEMS

MEMS/MOEMS Components and Their Applications IV

MEMS/MOEMS Components and Their Applications II

MEMS/MOEMS Components and Their Applications III

MEMS/MOEMS Technologies and Applications III

Optical and EUV Nanolithography XXXV

Optical and EUV Nanolithography XXXVI

Reliability, Testing, and Characterization of MEMS/MOEMS II

Design, Test, Integration, and Packaging of MEMS/MOEMS

Reliability, Testing, and Characterization of MEMS/MOEMS III

AOPC 2021: Micro-optics and MOEMS

MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface

Design, Test, Integration, and Packaging of MEMS/MOEMS 2001

Design, Test, Integration, and Packaging of MEMS/MOEMS 2002

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI

Design, Test, Integration and Packaging of MEMS/MOEMS, Symposium on

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII

MOEMS: Micro-Opto-Electro-Mechanical Systems
gan: Motamedi, Manouchehr
Cyhoeddwyd: (2009)

MOEMS: Micro-Opto-Electro-Mechanical Systems
gan: Motamedi, Manouchehr

Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X

Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI