Journal of Microlithography, Microfabrication, and Microsystems
Aineistotyyppi: | Elektroninen Aikakauslehti |
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Kieli: | English |
Julkaistu: |
SPIE
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Linkit: | Full text available on SPIE Digital Library Off-campus access |
Samankaltaisia teoksia
- Journal of Microlithography, Microfabrication, and Microsystems
- Journal of Microlithography, Microfabrication, and Microsystems
-
Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography
Tekijä: Rai-Choudhury, Prosenjit
Julkaistu: (2009) -
Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography
Tekijä: Rai-Choudhury, Prosenjit -
Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication
Tekijä: Rai-Choudhury, Prosenjit
Julkaistu: (2009)