Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
| Format: | Electronic Journal |
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| Language: | English |
| Published: |
AVS: Science & Technology of Materials, Interfaces, and Processing
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| Subjects: | |
| Online Access: | Full text available on AIP Off-campus access |
| Published: | Vol. 9, no. 1 |
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| Item Description: | <strong>Off-Campus Access:</strong> Athens ID and Password Required <strong>On-Campus Access:</strong> No User ID or Password Required |
| Physical Description: | 1 online resource |
| Format: | Mode of access: Internet |
| ISSN: | 1071-1023 1520-8567 |
| Access: | Electronic access restricted to authorized BRAC University faculty, staff and students |