Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. AVS: Science & Technology of Materials, Interfaces, and Processing.
Cytowanie według stylu Chicago (wyd. 17)Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. AVS: Science & Technology of Materials, Interfaces, and Processing.
Cytowanie według stylu MLA (wyd. 8)Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. AVS: Science & Technology of Materials, Interfaces, and Processing.
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