Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena. AVS: Science & Technology of Materials, Interfaces, and Processing.
Chicago Style (17th ed.) CitationJournal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena. AVS: Science & Technology of Materials, Interfaces, and Processing.
MLA (8th ed.) CitationJournal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena. AVS: Science & Technology of Materials, Interfaces, and Processing.
Warning: These citations may not always be 100% accurate.