Field Guide to Optical Lithography
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| Materyal Türü: | Elektronik Ekitap |
| Dil: | English |
| Baskı/Yayın Bilgisi: |
SPIE,
2009
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| Konular: | |
| Online Erişim: | Full text available on SPIE Digital Library Off-campus access |
| Diğer Bilgileri: | <strong>Off-Campus Access:</strong> Athens ID and Password Required <strong>On-Campus Access:</strong> No User ID or Password Required |
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| Fiziksel Özellikler: | 1 online resource |
| Materyal Türü: | Mode of access: Internet |
| ISBN: | 9780819462077 9780819478214 |
| DOI: | 10.1117/3.665802 |
| Erişim: | Electronic access restricted to authorized BRAC University faculty, staff and students |