APA (7th ed.) Citation

Mack, C. A. (2009). Field Guide to Optical Lithography. SPIE. https://doi.org/10.1117/3.665802

Chicago Style (17th ed.) Citation

Mack, Chris A. Field Guide to Optical Lithography. SPIE, 2009. https://doi.org/10.1117/3.665802.

MLA (8th ed.) Citation

Mack, Chris A. Field Guide to Optical Lithography. SPIE, 2009. https://doi.org/10.1117/3.665802.

Warning: These citations may not always be 100% accurate.