Mack, C. A. (2009). Field Guide to Optical Lithography. SPIE. https://doi.org/10.1117/3.665802
Chicago Style (17th ed.) CitationMack, Chris A. Field Guide to Optical Lithography. SPIE, 2009. https://doi.org/10.1117/3.665802.
MLA citiranjeMack, Chris A. Field Guide to Optical Lithography. SPIE, 2009. https://doi.org/10.1117/3.665802.
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