APA (7th ed.) Citation

Steinbruchel, C. (2009). Copper Interconnect Technology. SPIE. https://doi.org/10.1117/3.2265078

Chicago Style (17th ed.) Citation

Steinbruchel, Christophy. Copper Interconnect Technology. SPIE, 2009. https://doi.org/10.1117/3.2265078.

MLA (8th ed.) Citation

Steinbruchel, Christophy. Copper Interconnect Technology. SPIE, 2009. https://doi.org/10.1117/3.2265078.

Warning: These citations may not always be 100% accurate.