Guerrero, D. (2020). A Lithographer's Guide to Patterning CMOS Devices with Directed Self-Assembly. SPIE. https://doi.org/10.1117/3.2567441
Chicago (17e ed.) BronvermeldingGuerrero, Douglas. A Lithographer's Guide to Patterning CMOS Devices with Directed Self-Assembly. SPIE, 2020. https://doi.org/10.1117/3.2567441.
MLA (8e ed.) BronvermeldingGuerrero, Douglas. A Lithographer's Guide to Patterning CMOS Devices with Directed Self-Assembly. SPIE, 2020. https://doi.org/10.1117/3.2567441.
Let op: Deze citaties zijn niet altijd 100% accuraat.