Guerrero, D. (2020). A Lithographer's Guide to Patterning CMOS Devices with Directed Self-Assembly. SPIE. https://doi.org/10.1117/3.2567441
Style de citation Chicago (17e éd.)Guerrero, Douglas. A Lithographer's Guide to Patterning CMOS Devices with Directed Self-Assembly. SPIE, 2020. https://doi.org/10.1117/3.2567441.
Style de citation MLA (8e éd.)Guerrero, Douglas. A Lithographer's Guide to Patterning CMOS Devices with Directed Self-Assembly. SPIE, 2020. https://doi.org/10.1117/3.2567441.
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