Guerrero, D. (2020). A Lithographer's Guide to Patterning CMOS Devices with Directed Self-Assembly. SPIE. https://doi.org/10.1117/3.2567441
Chicago-Zitierstil (17. Ausg.)Guerrero, Douglas. A Lithographer's Guide to Patterning CMOS Devices with Directed Self-Assembly. SPIE, 2020. https://doi.org/10.1117/3.2567441.
MLA-Zitierstil (8. Ausg.)Guerrero, Douglas. A Lithographer's Guide to Patterning CMOS Devices with Directed Self-Assembly. SPIE, 2020. https://doi.org/10.1117/3.2567441.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.