Guerrero, D. (2020). A Lithographer's Guide to Patterning CMOS Devices with Directed Self-Assembly. SPIE. https://doi.org/10.1117/3.2567441
Cita Chicago (17th ed.)Guerrero, Douglas. A Lithographer's Guide to Patterning CMOS Devices with Directed Self-Assembly. SPIE, 2020. https://doi.org/10.1117/3.2567441.
Cita MLA (8th ed.)Guerrero, Douglas. A Lithographer's Guide to Patterning CMOS Devices with Directed Self-Assembly. SPIE, 2020. https://doi.org/10.1117/3.2567441.
Atenció: Aquestes cites poden no estar 100% correctes.