Okoroanyanwu, U. (2010). Chemistry and Lithography. SPIE. https://doi.org/10.1117/3.821384
Cita Chicago (17th ed.)Okoroanyanwu, Uzodinma. Chemistry and Lithography. SPIE, 2010. https://doi.org/10.1117/3.821384.
Cita MLA (8th ed.)Okoroanyanwu, Uzodinma. Chemistry and Lithography. SPIE, 2010. https://doi.org/10.1117/3.821384.
Atenció: Aquestes cites poden no estar 100% correctes.