Wong, A. K. (2009). Resolution Enhancement Techniques in Optical Lithography. SPIE. https://doi.org/10.1117/3.401208
Chicago-referens (17:e uppl.)Wong, Alfred Kwok-Kit. Resolution Enhancement Techniques in Optical Lithography. SPIE, 2009. https://doi.org/10.1117/3.401208.
MLA-referens (8:e uppl.)Wong, Alfred Kwok-Kit. Resolution Enhancement Techniques in Optical Lithography. SPIE, 2009. https://doi.org/10.1117/3.401208.
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