Wong, A. K. (2009). Resolution Enhancement Techniques in Optical Lithography. SPIE. https://doi.org/10.1117/3.401208
Chicago (17e ed.) BronvermeldingWong, Alfred Kwok-Kit. Resolution Enhancement Techniques in Optical Lithography. SPIE, 2009. https://doi.org/10.1117/3.401208.
MLA (8e ed.) BronvermeldingWong, Alfred Kwok-Kit. Resolution Enhancement Techniques in Optical Lithography. SPIE, 2009. https://doi.org/10.1117/3.401208.
Let op: Deze citaties zijn niet altijd 100% accuraat.