Wong, A. K. (2009). Resolution Enhancement Techniques in Optical Lithography. SPIE. https://doi.org/10.1117/3.401208
Citazione stile Chigago Style (17a edizione)Wong, Alfred Kwok-Kit. Resolution Enhancement Techniques in Optical Lithography. SPIE, 2009. https://doi.org/10.1117/3.401208.
Citatione MLA (8a ed.)Wong, Alfred Kwok-Kit. Resolution Enhancement Techniques in Optical Lithography. SPIE, 2009. https://doi.org/10.1117/3.401208.
Attenzione: Queste citazioni potrebbero non essere precise al 100%.