Wong, A. K. (2009). Resolution Enhancement Techniques in Optical Lithography. SPIE. https://doi.org/10.1117/3.401208
Citación estilo ChicagoWong, Alfred Kwok-Kit. Resolution Enhancement Techniques in Optical Lithography. SPIE, 2009. https://doi.org/10.1117/3.401208.
Cita MLAWong, Alfred Kwok-Kit. Resolution Enhancement Techniques in Optical Lithography. SPIE, 2009. https://doi.org/10.1117/3.401208.
Warning: These citations may not always be 100% accurate.