Cita APA

Levinson, H. J. (2011). Principles of Lithography, 3rd Ed. SPIE. https://doi.org/10.1117/3.865363

Citación estilo Chicago

Levinson, Harry J. Principles of Lithography, 3rd Ed. SPIE, 2011. https://doi.org/10.1117/3.865363.

Cita MLA

Levinson, Harry J. Principles of Lithography, 3rd Ed. SPIE, 2011. https://doi.org/10.1117/3.865363.

Warning: These citations may not always be 100% accurate.