Levinson, H. J. (2011). Principles of Lithography, 3rd Ed. SPIE. https://doi.org/10.1117/3.865363
Chicago Style aipamenaLevinson, Harry J. Principles of Lithography, 3rd Ed. SPIE, 2011. https://doi.org/10.1117/3.865363.
MLA aipamenaLevinson, Harry J. Principles of Lithography, 3rd Ed. SPIE, 2011. https://doi.org/10.1117/3.865363.
Kontuz: berrikusi erreferentzia hauek erabili aurretik.