Levinson, H. J. (2011). Principles of Lithography, 3rd Ed. SPIE. https://doi.org/10.1117/3.865363
Cita Chicago Style (17a ed.)Levinson, Harry J. Principles of Lithography, 3rd Ed. SPIE, 2011. https://doi.org/10.1117/3.865363.
Cita MLA (8a ed.)Levinson, Harry J. Principles of Lithography, 3rd Ed. SPIE, 2011. https://doi.org/10.1117/3.865363.
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