APA (7th ed.) Citation

Levinson, H. J. (2011). Principles of Lithography, 3rd Ed. SPIE. https://doi.org/10.1117/3.865363

Chicago Style (17th ed.) Citation

Levinson, Harry J. Principles of Lithography, 3rd Ed. SPIE, 2011. https://doi.org/10.1117/3.865363.

MLA (8th ed.) Citation

Levinson, Harry J. Principles of Lithography, 3rd Ed. SPIE, 2011. https://doi.org/10.1117/3.865363.

Warning: These citations may not always be 100% accurate.