Levinson, H. J. (2011). Principles of Lithography, 3rd Ed. SPIE. https://doi.org/10.1117/3.865363
Cita Chicago (17th ed.)Levinson, Harry J. Principles of Lithography, 3rd Ed. SPIE, 2011. https://doi.org/10.1117/3.865363.
Cita MLA (8th ed.)Levinson, Harry J. Principles of Lithography, 3rd Ed. SPIE, 2011. https://doi.org/10.1117/3.865363.
Atenció: Aquestes cites poden no estar 100% correctes.