Levinson, H. J. (2009). Principles of Lithography, 2nd Ed. SPIE. https://doi.org/10.1117/3.601520
Chicago Style aipamenaLevinson, Harry J. Principles of Lithography, 2nd Ed. SPIE, 2009. https://doi.org/10.1117/3.601520.
MLA aipamenaLevinson, Harry J. Principles of Lithography, 2nd Ed. SPIE, 2009. https://doi.org/10.1117/3.601520.
Kontuz: berrikusi erreferentzia hauek erabili aurretik.