Levinson, H. J. (2009). Principles of Lithography, 2nd Ed. SPIE. https://doi.org/10.1117/3.601520
Cita Chicago Style (17a ed.)Levinson, Harry J. Principles of Lithography, 2nd Ed. SPIE, 2009. https://doi.org/10.1117/3.601520.
Cita MLA (8a ed.)Levinson, Harry J. Principles of Lithography, 2nd Ed. SPIE, 2009. https://doi.org/10.1117/3.601520.
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