APA (7th ed.) Citation

Levinson, H. J. (2009). Principles of Lithography, 2nd Ed. SPIE. https://doi.org/10.1117/3.601520

Chicago Style (17th ed.) Citation

Levinson, Harry J. Principles of Lithography, 2nd Ed. SPIE, 2009. https://doi.org/10.1117/3.601520.

MLA (8th ed.) Citation

Levinson, Harry J. Principles of Lithography, 2nd Ed. SPIE, 2009. https://doi.org/10.1117/3.601520.

Warning: These citations may not always be 100% accurate.