Levinson, H. J. (2009). Principles of Lithography, 2nd Ed. SPIE. https://doi.org/10.1117/3.601520
Cita Chicago (17th ed.)Levinson, Harry J. Principles of Lithography, 2nd Ed. SPIE, 2009. https://doi.org/10.1117/3.601520.
Cita MLA (8th ed.)Levinson, Harry J. Principles of Lithography, 2nd Ed. SPIE, 2009. https://doi.org/10.1117/3.601520.
Atenció: Aquestes cites poden no estar 100% correctes.