Optical Physics for Nanolithography
| Glavni autor: | |
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| Format: | Elektronički e-knjiga |
| Jezik: | English |
| Izdano: |
SPIE,
2018
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| Teme: | |
| Online pristup: | Full text available on SPIE Digital Library Off-campus access |
| Opis djela: | <strong>Off-Campus Access:</strong> Athens ID and Password Required <strong>On-Campus Access:</strong> No User ID or Password Required |
|---|---|
| Opis: | 1 online resource |
| Format: | Mode of access: Internet |
| ISBN: | 9781510617377 9781510617384 |
| Digitalni identifikator objekta: | 10.1117/3.2314953 |
| Pristup: | Electronic access restricted to authorized BRAC University faculty, staff and students |