Yen, A. (2018). Optical Physics for Nanolithography. SPIE. https://doi.org/10.1117/3.2314953
Lua i Stíl Chicago (17ú heag.)Yen, Anthony. Optical Physics for Nanolithography. SPIE, 2018. https://doi.org/10.1117/3.2314953.
Lua MLA (8ú heag.)Yen, Anthony. Optical Physics for Nanolithography. SPIE, 2018. https://doi.org/10.1117/3.2314953.
Rabhadh: Seans nach mbeach na luanna seo go hiomlán cruinn i ngach uile chás.