Optical Lithography: Here is Why, Second Edition
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| Format: | Elektroniczne E-book |
| Język: | English |
| Wydane: |
SPIE,
2021
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| Hasła przedmiotowe: | |
| Dostęp online: | Full text available on SPIE Digital Library Off-campus access |
| Deskrypcja: | <strong>Off-Campus Access:</strong> Athens ID and Password Required <strong>On-Campus Access:</strong> No User ID or Password Required |
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| Opis fizyczny: | 1 online resource |
| Format: | Mode of access: Internet |
| ISBN: | 9781510639959 9781510639966 |
| DOI: | 10.1117/3.2586123 |
| Ograniczenie dostępu: | Electronic access restricted to authorized BRAC University faculty, staff and students |