APA (7th ed.) Citation

Burn, J. L. (2021). Optical Lithography: Here is Why, Second Edition. SPIE. https://doi.org/10.1117/3.2586123

Chicago Style (17th ed.) Citation

Burn, J. Lin. Optical Lithography: Here Is Why, Second Edition. SPIE, 2021. https://doi.org/10.1117/3.2586123.

MLA (8th ed.) Citation

Burn, J. Lin. Optical Lithography: Here Is Why, Second Edition. SPIE, 2021. https://doi.org/10.1117/3.2586123.

Warning: These citations may not always be 100% accurate.