Optical Lithography: Here Is Why
| Главный автор: | |
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| Формат: | Электронный ресурс eКнига |
| Язык: | English |
| Опубликовано: |
SPIE,
2010
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| Предметы: | |
| Online-ссылка: | Full text available on SPIE Digital Library Off-campus access |
| Примечание: | <strong>Off-Campus Access:</strong> Athens ID and Password Required <strong>On-Campus Access:</strong> No User ID or Password Required |
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| Объем: | 1 online resource |
| Формат: | Mode of access: Internet |
| ISBN: | 9780819475602 9780819481825 |
| DOI: | 10.1117/3.821000 |
| Доступ: | Electronic access restricted to authorized BRAC University faculty, staff and students |