Erdmann, A. (2021). Optical and EUV Lithography: A Modeling Perspective. SPIE. https://doi.org/10.1117/3.2576902
Čikaški stil citiranja (17. izdanje)Erdmann, Andreas. Optical and EUV Lithography: A Modeling Perspective. SPIE, 2021. https://doi.org/10.1117/3.2576902.
MLA način citiranja (8. izdanje)Erdmann, Andreas. Optical and EUV Lithography: A Modeling Perspective. SPIE, 2021. https://doi.org/10.1117/3.2576902.
Upozorenje: Ovi citati možda nisu uvijek 100% točni.