Okoroanyanwu, U. (2015). Molecular Theory of Lithography. SPIE. https://doi.org/10.1117/3.2179925
Dyfyniad Arddull ChicagoOkoroanyanwu, Uzodinma. Molecular Theory of Lithography. SPIE, 2015. https://doi.org/10.1117/3.2179925.
Dyfyniad MLAOkoroanyanwu, Uzodinma. Molecular Theory of Lithography. SPIE, 2015. https://doi.org/10.1117/3.2179925.
Rhybudd: Mae'n bosib nad yw'r dyfyniadau hyn bob amser yn 100% cywir.