Okoroanyanwu, U. (2015). Molecular Theory of Lithography. SPIE. https://doi.org/10.1117/3.2179925
Cita Chicago (17th ed.)Okoroanyanwu, Uzodinma. Molecular Theory of Lithography. SPIE, 2015. https://doi.org/10.1117/3.2179925.
Cita MLA (8th ed.)Okoroanyanwu, Uzodinma. Molecular Theory of Lithography. SPIE, 2015. https://doi.org/10.1117/3.2179925.
Atenció: Aquestes cites poden no estar 100% correctes.