Levinson, H. J. (2020). Extreme Ultraviolet Lithography. SPIE. https://doi.org/10.1117/3.2581446
Cita Chicago (17th ed.)Levinson, Harry J. Extreme Ultraviolet Lithography. SPIE, 2020. https://doi.org/10.1117/3.2581446.
Cita MLA (8th ed.)Levinson, Harry J. Extreme Ultraviolet Lithography. SPIE, 2020. https://doi.org/10.1117/3.2581446.
Atenció: Aquestes cites poden no estar 100% correctes.