Xiao, H. (2012). Introduction to Semiconductor Manufacturing Technology, 2nd Ed. SPIE. https://doi.org/10.1117/3.924283
Chicago-viite (17. p.)Xiao, Hong. Introduction to Semiconductor Manufacturing Technology, 2nd Ed. SPIE, 2012. https://doi.org/10.1117/3.924283.
MLA-viite (8. p.)Xiao, Hong. Introduction to Semiconductor Manufacturing Technology, 2nd Ed. SPIE, 2012. https://doi.org/10.1117/3.924283.
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