Introduction to Metrology Applications in IC Manufacturing
| Huvudupphovsman: | |
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| Materialtyp: | Elektronisk E-bok |
| Språk: | English |
| Publicerad: |
SPIE,
2015
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| Ämnen: | |
| Länkar: | Full text available on SPIE Digital Library Off-campus access |
| Beskrivning: | <strong>Off-Campus Access:</strong> Athens ID and Password Required <strong>On-Campus Access:</strong> No User ID or Password Required |
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| Fysisk beskrivning: | 1 online resource |
| Materialtyp: | Mode of access: Internet |
| ISBN: | 9781628416626 9781628418118 |
| DOI: | 10.1117/3.2197207 |
| Tillgång: | Electronic access restricted to authorized BRAC University faculty, staff and students |