Bakshi, V. (2018). EUV Lithography, Second Edition. SPIE. https://doi.org/10.1117/3.2305675
Chicago Style (17th ed.) CitationBakshi, Vivek. EUV Lithography, Second Edition. SPIE, 2018. https://doi.org/10.1117/3.2305675.
MLA引文Bakshi, Vivek. EUV Lithography, Second Edition. SPIE, 2018. https://doi.org/10.1117/3.2305675.
警告:這些引文格式不一定是100%准確.