Bakshi, V. (2018). EUV Lithography, Second Edition. SPIE. https://doi.org/10.1117/3.2305675
Chicago-referens (17:e uppl.)Bakshi, Vivek. EUV Lithography, Second Edition. SPIE, 2018. https://doi.org/10.1117/3.2305675.
MLA-referens (8:e uppl.)Bakshi, Vivek. EUV Lithography, Second Edition. SPIE, 2018. https://doi.org/10.1117/3.2305675.
Varning: dessa hänvisningar är inte alltid fullständigt riktiga.