Bakshi, V. (2018). EUV Lithography, Second Edition. SPIE. https://doi.org/10.1117/3.2305675
Chicago (17e ed.) BronvermeldingBakshi, Vivek. EUV Lithography, Second Edition. SPIE, 2018. https://doi.org/10.1117/3.2305675.
MLA (8e ed.) BronvermeldingBakshi, Vivek. EUV Lithography, Second Edition. SPIE, 2018. https://doi.org/10.1117/3.2305675.
Let op: Deze citaties zijn niet altijd 100% accuraat.