Bakshi, V. (2018). EUV Lithography, Second Edition. SPIE. https://doi.org/10.1117/3.2305675
Lua i Stíl Chicago (17ú heag.)Bakshi, Vivek. EUV Lithography, Second Edition. SPIE, 2018. https://doi.org/10.1117/3.2305675.
Lua MLA (8ú heag.)Bakshi, Vivek. EUV Lithography, Second Edition. SPIE, 2018. https://doi.org/10.1117/3.2305675.
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