APA (7th ed.) Citation

Bakshi, V. (2018). EUV Lithography, Second Edition. SPIE. https://doi.org/10.1117/3.2305675

Chicago Style (17th ed.) Citation

Bakshi, Vivek. EUV Lithography, Second Edition. SPIE, 2018. https://doi.org/10.1117/3.2305675.

MLA (8th ed.) Citation

Bakshi, Vivek. EUV Lithography, Second Edition. SPIE, 2018. https://doi.org/10.1117/3.2305675.

Warning: These citations may not always be 100% accurate.