Bakshi, V. (2018). EUV Lithography, Second Edition. SPIE. https://doi.org/10.1117/3.2305675
Cita Chicago (17th ed.)Bakshi, Vivek. EUV Lithography, Second Edition. SPIE, 2018. https://doi.org/10.1117/3.2305675.
Cita MLA (8th ed.)Bakshi, Vivek. EUV Lithography, Second Edition. SPIE, 2018. https://doi.org/10.1117/3.2305675.
Atenció: Aquestes cites poden no estar 100% correctes.