Advanced Processes for 193-nm Immersion Lithography
| Päätekijä: | |
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| Aineistotyyppi: | Elektroninen E-kirja |
| Kieli: | English |
| Julkaistu: |
SPIE,
2009
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| Aiheet: | |
| Linkit: | Full text available on SPIE Digital Library Off-campus access |
| Huomautukset: | <strong>Off-Campus Access:</strong> Athens ID and Password Required <strong>On-Campus Access:</strong> No User ID or Password Required |
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| Ulkoasu: | 1 online resource |
| Aineistotyyppi: | Mode of access: Internet |
| ISBN: | 9780819475572 9780819478436 |
| DOI: | 10.1117/3.820233 |
| Pääsy: | Electronic access restricted to authorized BRAC University faculty, staff and students |