APA (7. basım) Alıntı

Wei, Y. (2009). Advanced Processes for 193-nm Immersion Lithography. SPIE. https://doi.org/10.1117/3.820233

Chicago Style (17. basım) Atıf

Wei, Yayi. Advanced Processes for 193-nm Immersion Lithography. SPIE, 2009. https://doi.org/10.1117/3.820233.

MLA (8th ed.) Atıf

Wei, Yayi. Advanced Processes for 193-nm Immersion Lithography. SPIE, 2009. https://doi.org/10.1117/3.820233.