APA citiranje

Wei, Y. (2009). Advanced Processes for 193-nm Immersion Lithography. SPIE. https://doi.org/10.1117/3.820233

Chicago Style (17th ed.) Citation

Wei, Yayi. Advanced Processes for 193-nm Immersion Lithography. SPIE, 2009. https://doi.org/10.1117/3.820233.

MLA citiranje

Wei, Yayi. Advanced Processes for 193-nm Immersion Lithography. SPIE, 2009. https://doi.org/10.1117/3.820233.