Wei, Y. (2009). Advanced Processes for 193-nm Immersion Lithography. SPIE. https://doi.org/10.1117/3.820233
Čikaški stil citiranja (17. izdanje)Wei, Yayi. Advanced Processes for 193-nm Immersion Lithography. SPIE, 2009. https://doi.org/10.1117/3.820233.
MLA način citiranja (8. izdanje)Wei, Yayi. Advanced Processes for 193-nm Immersion Lithography. SPIE, 2009. https://doi.org/10.1117/3.820233.
Upozorenje: Ovi citati možda nisu uvijek 100% točni.