Dyfyniad APA

Wei, Y. (2009). Advanced Processes for 193-nm Immersion Lithography. SPIE. https://doi.org/10.1117/3.820233

Dyfyniad Arddull Chicago

Wei, Yayi. Advanced Processes for 193-nm Immersion Lithography. SPIE, 2009. https://doi.org/10.1117/3.820233.

Dyfyniad MLA

Wei, Yayi. Advanced Processes for 193-nm Immersion Lithography. SPIE, 2009. https://doi.org/10.1117/3.820233.

Rhybudd: Mae'n bosib nad yw'r dyfyniadau hyn bob amser yn 100% cywir.