Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography
| Prif Awdur: | |
|---|---|
| Fformat: | Electronig eLyfr |
| Iaith: | English |
| Cyhoeddwyd: |
SPIE,
2009
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| Pynciau: | |
| Mynediad Ar-lein: | Full text available on SPIE Digital Library Off-campus access |
| Disgrifiad o'r Eitem: | <strong>Off-Campus Access:</strong> Athens ID and Password Required <strong>On-Campus Access:</strong> No User ID or Password Required |
|---|---|
| Disgrifiad Corfforoll: | 1 online resource |
| Fformat: | Mode of access: Internet |
| ISBN: | 9780819497864 9781510607965 |
| DOI: | 10.1117/3.2265070 |
| Mynediad: | Electronic access restricted to authorized BRAC University faculty, staff and students |