Rai-Choudhury, P. (2009). Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography. SPIE. https://doi.org/10.1117/3.2265070
Chicago Style (17th ed.) CitationRai-Choudhury, Prosenjit. Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography. SPIE, 2009. https://doi.org/10.1117/3.2265070.
MLA引文Rai-Choudhury, Prosenjit. Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography. SPIE, 2009. https://doi.org/10.1117/3.2265070.
警告:這些引文格式不一定是100%准確.